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電子元器件&半導體芯片用UVLED 光源(4寸/6寸/8寸/12寸UVLED光源)

電子元器件&半導體芯片用UVLED 光源(4寸/6寸/8寸/12寸UVLED光源)

一、電子元器件/半導體芯片光源特點:

  *波長365nm/385nm/395nm/405nm。

  *光源平行半角1.5°~3°可選,光偏角<0.5°,可滿足高解析度曝光需求;

  *光源面積:4寸/6寸/8寸/12寸

二、產品主要技術參數:


1.5°~3°可選
序號指標參數目前水平
1光源波段365/385/395/405nm (可選單波,混波)
2產品用途電子元器件,半導體芯片等
3平行半角0.5°~3°(可選)
4光照面積100*100mm~300mm*300mm
5不均勻性<4%


三、光源使用方向

    現廣泛應用于晶體管、二極管、電阻、電容、電感、可控硅、肖特基等器件生產的核心曝光工藝環節。



                      

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