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光刻機專用UV-LED光源

光刻機專用UV-LED光源

① 曝光面積: 4'', 6'', 8''
② 波段: 365nm, 385nm, 395nm, 405nm
單波段和雙波段耦合
③  有效工作面積:
4'': 110*110mm
6'': 160*160mm
8'': 200*200mm
④  不均勻性: ≤4%  （max-min）/ (max+min) *100%
⑤ 光強/能量值:
4'': ＞100mw@365nm  25A
6'': ＞ 50mw@365nm   25A

8'': 25-50mw@365nm 25A

⑥ 平行半角:

4'': ≤1.8°

6'': ≤1.3°

8'': ≤1.2°-2°

⑦ 工作距離: 100-350nm

⑧ 水冷方式

豫公網安備 41072102000587號
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